About 20,000 people were at Vale Park on Saturday for a gig that was postponed for two years due to Covid.
Williams called it "an incredibly special night" and raised funds for charities including Unicef and The Donna Louise Children's Hospice.
He played all of his biggest hits, including Let Me Entertain You, Rock DJ, Millennium and Angels.
Williams, 48, who also performed a cover of Don't Look Back in Anger by Oasis, told the crowd he wanted to make this a regular thing, BBC Radio Stoke reported.