Some of the 2,500 ravers in Lieuron, near Rennes in northern France, had planned to party until Tuesday.
Police issued fines to revellers found leaving and the organisers were being identified as the party ended.
A number of party-goers were from the UK and Spain, police said.
Attendees clashed with police, setting fire to a car and throwing objects at officers attempting to shut the event down. At least three officers were injured.